IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v11y2020i1d10.1038_s41467-020-17842-w.html
   My bibliography  Save this article

Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication

Author

Listed:
  • Chen Chen

    (Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University
    Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West)

  • Zhen Wen

    (Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University)

  • Jihong Shi

    (Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University)

  • Xiaohua Jian

    (Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences)

  • Peiyang Li

    (Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences)

  • John T. W. Yeow

    (Advanced Micro-/Nano-Devices Lab, Department of Systems Design Engineering, Waterloo Institute for Nanotechnology, University of Waterloo, 200 University Avenue West)

  • Xuhui Sun

    (Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Joint International Research Laboratory of Carbon-Based Functional Materials and Devices, Soochow University)

Abstract

As a promising energy converter, the requirement for miniaturization and high-accuracy of triboelectric nanogenerators always remains urgent. In this work, a micro triboelectric ultrasonic device was developed by integrating a triboelectric nanogenerator and micro-electro-mechanical systems technology. To date, it sets a world record for the smallest triboelectric device, with a 50 µm-sized diaphragm, and enables the working frequency to be brought to megahertz. This dramatically improves the miniaturization and chip integration of the triboelectric nanogenerator. With 63 kPa@1 MHz ultrasound input, the micro triboelectric ultrasonic device can generate the voltage signal of 16.8 mV and 12.7 mV through oil and sound-attenuation medium, respectively. It also achieved the signal-to-ratio of 20.54 dB and exhibited the practical potential for signal communication by modulating the incident ultrasound. Finally, detailed optimization approaches have also been proposed to further improve the output power of the micro triboelectric ultrasonic device.

Suggested Citation

  • Chen Chen & Zhen Wen & Jihong Shi & Xiaohua Jian & Peiyang Li & John T. W. Yeow & Xuhui Sun, 2020. "Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication," Nature Communications, Nature, vol. 11(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:11:y:2020:i:1:d:10.1038_s41467-020-17842-w
    DOI: 10.1038/s41467-020-17842-w
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-020-17842-w
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-020-17842-w?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Hongfa Zhao & Minyi Xu & Mingrui Shu & Jie An & Wenbo Ding & Xiangyu Liu & Siyuan Wang & Cong Zhao & Hongyong Yu & Hao Wang & Chuan Wang & Xianping Fu & Xinxiang Pan & Guangming Xie & Zhong Lin Wang, 2022. "Underwater wireless communication via TENG-generated Maxwell’s displacement current," Nature Communications, Nature, vol. 13(1), pages 1-10, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:11:y:2020:i:1:d:10.1038_s41467-020-17842-w. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.