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An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays

Author

Listed:
  • Minrui Chen

    (Nanjing University)

  • Weifeng Luo

    (Nanjing University)

  • Zhongqi Xu

    (Nanjing University)

  • Xueping Zhang

    (Nanjing University)

  • Bo Xie

    (Huibei Normal University)

  • Guanghou Wang

    (Nanjing University)

  • Min Han

    (Nanjing University)

Abstract

Tunneling conductance among nanoparticle arrays is extremely sensitive to the spacing of nanoparticles and might be applied to fabricate ultra-sensitive sensors. Such sensors are of paramount significance for various application, such as automotive systems and consumer electronics. Here, we represent a sensitive pressure sensor which is composed of a piezoresistive strain transducer fabricated from closely spaced nanoparticle films deposited on a flexible membrane. Benefited from this unique quantum transport mechanism, the thermal noise of the sensor decreases significantly, providing the opportunity for our devices to serve as high-performance pressure sensors with an ultrahigh resolution as fine as about 0.5 Pa and a high sensitivity of 0.13 kPa−1. Moreover, our sensor with such an unprecedented response capability can be operated as a barometric altimeter with an altitude resolution of about 1 m. The outstanding behaviors of our devices make nanoparticle arrays for use as actuation materials for pressure measurement.

Suggested Citation

  • Minrui Chen & Weifeng Luo & Zhongqi Xu & Xueping Zhang & Bo Xie & Guanghou Wang & Min Han, 2019. "An ultrahigh resolution pressure sensor based on percolative metal nanoparticle arrays," Nature Communications, Nature, vol. 10(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:10:y:2019:i:1:d:10.1038_s41467-019-12030-x
    DOI: 10.1038/s41467-019-12030-x
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    Cited by:

    1. Nan Li & Yingxin Zhou & Yuqing Li & Chunwei Li & Wentao Xiang & Xueqing Chen & Pan Zhang & Qi Zhang & Jun Su & Bohao Jin & Huize Song & Cai Cheng & Minghui Guo & Lei Wang & Jing Liu, 2024. "Transformable 3D curved high-density liquid metal coils – an integrated unit for general soft actuation, sensing and communication," Nature Communications, Nature, vol. 15(1), pages 1-13, December.

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