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Etching Method for the Microstructure of LTCC

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  • Feng Yuan

Abstract

1wt% hydrochloride acid (HCl), 2wt% hydrofluoric acid (HF), 10wt% hydro nitride acid (HNO3), and 19wt% sodium hydroxide (NaOH), were used to etch the LTCC. The SEM analysis shows that the microstructure of the LTCC A6 (Ferro) can be obtained through the etching of the 19wt% sodium hydroxide. The XRD analysis confirmed that the glass phase can be selectively removed from the glass ceramics in a 19 wt% sodium hydroxide aqueous solution at room temperature after 20 hrs.

Suggested Citation

  • Feng Yuan, 2010. "Etching Method for the Microstructure of LTCC," Modern Applied Science, Canadian Center of Science and Education, vol. 4(4), pages 1-70, April.
    • Handle: RePEc:ibn:masjnl:v:4:y:2010:i:4:p:70
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    JEL classification:

    • R00 - Urban, Rural, Regional, Real Estate, and Transportation Economics - - General - - - General
    • Z0 - Other Special Topics - - General

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