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Dynamic Analysis of Cracked Cantilever, Electrostatic Microactuators Using Radial Basis Functions

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  • Ming-Hung Hsu

Abstract

The dynamic problems of a microactuator with a single edge crack are numerically formulated using radial basis functions. The microactuator model incorporates the taper ratio, electrode shapes, and crack length, all of which govern the dynamic behavior of microactuators. To optimize the design of a microactuator, many characteristics of various shaped cantilevers and curved electrodes are also investigated.

Suggested Citation

  • Ming-Hung Hsu, 2012. "Dynamic Analysis of Cracked Cantilever, Electrostatic Microactuators Using Radial Basis Functions," Mathematical Problems in Engineering, Hindawi, vol. 2012, pages 1-11, December.
    • Handle: RePEc:hin:jnlmpe:865461
    DOI: 10.1155/2012/865461
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