Multiresponse Optimization of a Compliant Guiding Mechanism Using Hybrid Taguchi-Grey Based Fuzzy Logic Approach

Because of a lack of precisely miniaturized guiding mechanism, micro/nanoindentation devices are now difficult to integrate inside scanning electron microscope. A compliant guiding mechanism (CGM) with a compact size, serving as an accurate positioning platform, is hence proposed in this paper. The displacement and first natural frequency are the most important quality responses of CGM. The geometric parameters of CGM and applied force play a vital role in determining those responses. The experiment plan is firstly designed by Taguchi’s orthogonal array. A hybrid approach of Taguchi-grey based fuzzy logic is then developed to optimize two responses, simultaneously. The grey relational analysis based on the fuzzy logic is used to achieve a grey-fuzzy reasoning grade (GFRG) that combines all the quality characteristics. The GFRG, serving as a performance index, determines optimal parameter levels. Analysis of variance is conducted to assess the significant parameters affecting the responses. The confirmation results revealed that the 195 μ m displacement of the CGM was many times greater than that of the previous mechanisms. It could be concluded that the quality responses of CGM can be significantly improved through the hybrid optimization approach. The proposed methodology has great applications for related compliant mechanisms and engineering sciences. Taking benefits of a compact structure into account, CGM has a great ability for micro/nanoindentation device inside scanning electron microscope.