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Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

Author

Listed:
  • Mario Versaci

    (Dipartimento di Ingegneria Civile Energia Ambiente e Materiali (DICEAM), Mediterranea University, Via Graziella Feo di Vito, I-89122 Reggio Calabria, Italy)

  • Giovanni Angiulli

    (Dipartimento di Ingegneria dell’Informazione Infrastrutture Energia Sostenibile (DIIES), Mediterranea University, Via Graziella Feo di Vito, I-89122 Reggio Calabria, Italy)

  • Alessandra Jannelli

    (Dipartimento di Scienze Matematiche e Informatiche, Scienze Fisiche e Scienze della Terra (MIFT), Messina University, Viale F. Stagno d’Alcontres, I-98166 Messina, Italy)

Abstract

In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.

Suggested Citation

  • Mario Versaci & Giovanni Angiulli & Alessandra Jannelli, 2020. "Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions," Mathematics, MDPI, vol. 8(4), pages 1-19, April.
    • Handle: RePEc:gam:jmathe:v:8:y:2020:i:4:p:487-:d:340062
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    Cited by:

    1. Paolo Di Barba & Luisa Fattorusso & Mario Versaci, 2022. "Solution Properties of a New Dynamic Model for MEMS with Parallel Plates in the Presence of Fringing Field," Mathematics, MDPI, vol. 10(23), pages 1-20, December.

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