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Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Author

Listed:
  • Ayman M. Alneamy

    (Department of Mechanical Engineering, Jazan University, Jazan 45142, Saudi Arabia)

  • Hassen M. Ouakad

    (Renewable Energy Engineering Department, Mediterranean Institute of Technology, South Mediterranean University, les Berges du Lac 2, Tunis 1053, Tunisia)

Abstract

The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.

Suggested Citation

  • Ayman M. Alneamy & Hassen M. Ouakad, 2024. "Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles," Mathematics, MDPI, vol. 12(7), pages 1-20, March.
    • Handle: RePEc:gam:jmathe:v:12:y:2024:i:7:p:970-:d:1363427
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