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Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry

Author

Listed:
  • Valentina Innocenzi

    (Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, Italy)

  • Svetlana B. Zueva

    (Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, Italy)

  • Francesco Vegliò

    (Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, Italy)

  • Ida De Michelis

    (Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, Italy)

Abstract

TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits long-lasting toxicity to aquatic systems. Despite this known toxicity, the authorities currently do not provide emission limits (i.e., discharge concentrations) for wastewater by EU regulation. The current scenario necessitates the study of the processes for industrial wastewater containing TMAH. This work aims to present a successful example of the treatment process for the degradation of TMAH waste solutions of the E&S industry. Research was conducted at the pilot scale, and the process feasibility (both technical and economic) and its environmental sustainability are demonstrated. This process, which treats three exhausted solutions with a high concentration of toxic substances, is considered to be innovative.

Suggested Citation

  • Valentina Innocenzi & Svetlana B. Zueva & Francesco Vegliò & Ida De Michelis, 2021. "Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry," Energies, MDPI, vol. 14(17), pages 1-8, August.
    • Handle: RePEc:gam:jeners:v:14:y:2021:i:17:p:5340-:d:623616
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    References listed on IDEAS

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    1. Francesco Ferella & Valentina Innocenzi & Svetlana Zueva & Valentina Corradini & Nicolò M. Ippolito & Ionela P. Birloaga & Ida De Michelis & Marina Prisciandaro & Francesco Vegliò, 2019. "Aerobic Treatment of Waste Process Solutions from the Semiconductor Industry: From Lab to Pilot Scale," Sustainability, MDPI, vol. 11(14), pages 1-11, July.
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    Cited by:

    1. Gabriele Di Giacomo, 2021. "Material and Energy Recovery from the Final Disposal of Organic Waste," Energies, MDPI, vol. 14(24), pages 1-2, December.
    2. Nicolas Lusinier & Isabelle Seyssiecq & Cecilia Sambusiti & Matthieu Jacob & Nicolas Lesage & Nicolas Roche, 2021. "Application of Moving Bed Biofilm Reactor and Fixed Bed Hybrid Biological Reactor for Oilfield Produced Water Treatment: Influence of Total Dissolved Solids Concentration," Energies, MDPI, vol. 14(21), pages 1-20, November.

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