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Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam

Author

Listed:
  • Sang Min Park

    (Intelligent Mechatronics Research Center, Korea Electronics Technology Institute (KETI), Bucheon 14502, Korea)

  • Eunsu Jang

    (Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon 16419, Korea)

  • Joon Sung Park

    (Intelligent Mechatronics Research Center, Korea Electronics Technology Institute (KETI), Bucheon 14502, Korea)

  • Jin-Hong Kim

    (Intelligent Mechatronics Research Center, Korea Electronics Technology Institute (KETI), Bucheon 14502, Korea)

  • Jun-Hyuk Choi

    (Intelligent Mechatronics Research Center, Korea Electronics Technology Institute (KETI), Bucheon 14502, Korea)

  • Byoung Kuk Lee

    (Department of Electrical and Computer Engineering, Sungkyunkwan University (SKKU), Suwon 16419, Korea)

Abstract

In this study, wafer cleaning equipment was designed and fabricated using the induction heating (IH) method and a short-time superheated steam (SHS) generation process. To prevent problems arising from the presence of particulate matter in the fluid flow region, pure grade 2 titanium (Ti) R50400 was used in the wafer cleaning equipment for heating objects via induction. The Ti load was designed and manufactured with a specific shape, along with the resonant network, to efficiently generate high-temperature steam by increasing the residence time of the fluid in the heating object. The IH performance of various shapes of heating objects made of Ti was analyzed and the results were compared. In addition, the heat capacity required to generate SHS was mathematically calculated and analyzed. The SHS heating performance was verified by conducting experiments using the designed 2.2 kW wafer cleaning equipment. The performance of the proposed pure Ti-based SHS generation system was found to be satisfactory, and SHS with a temperature higher than 200 °C was generated within 10 s using this system.

Suggested Citation

  • Sang Min Park & Eunsu Jang & Joon Sung Park & Jin-Hong Kim & Jun-Hyuk Choi & Byoung Kuk Lee, 2020. "Optimal Design of High-Frequency Induction Heating Apparatus for Wafer Cleaning Equipment Using Superheated Steam," Energies, MDPI, vol. 13(23), pages 1-16, November.
    • Handle: RePEc:gam:jeners:v:13:y:2020:i:23:p:6196-:d:451025
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