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Structure Function Analysis of Temperature-Dependent Thermal Properties of Nm-Thin Nb 2 O 5

Author

Listed:
  • Lisa Mitterhuber

    (Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria)

  • Elke Kraker

    (Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria)

  • Stefan Defregger

    (Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700 Leoben, Austria)

Abstract

A 166-nm-thick amorphous Niobium pentoxide layer (Nb 2 O 5 ) on a silicon substrate was investigated by using time domain thermoreflectance at ambient temperatures from 25 °C to 500 °C. In the time domain thermoreflectance measurements, thermal transients with a time resolution in (sub-)nanoseconds can be obtained by a pump-probe laser technique. The analysis of the thermal transient was carried out via the established analytical approach, but also by a numerical approach. The analytical approach showed a thermal diffusivity and thermal conductivity from 0.43 mm 2 /s to 0.74 mm 2 /s and from 1.0 W/mK to 2.3 W/mK, respectively to temperature. The used numerical approach was the structure function approach to map the measured heat path in terms of a R th C th -network. The structure function showed a decrease of R th with increasing temperature according to the increasing thermal conductivity of Nb 2 O 5 . The combination of both approaches contributes to an in-depth thermal analysis of Nb 2 O 5 film.

Suggested Citation

  • Lisa Mitterhuber & Elke Kraker & Stefan Defregger, 2019. "Structure Function Analysis of Temperature-Dependent Thermal Properties of Nm-Thin Nb 2 O 5," Energies, MDPI, vol. 12(4), pages 1-14, February.
    • Handle: RePEc:gam:jeners:v:12:y:2019:i:4:p:610-:d:206096
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