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Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter

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  • Bektaş, Gence
  • Kökbudak, Gamze
  • Keçeci, Ahmet Emin
  • Bütüner, Sümeyye Koçak
  • Asav, Hasan
  • Çiftpınar, Emine Hande
  • Canar, Hasan Hüseyin
  • Arıkan, Bülent
  • Turan, Raşit

Abstract

Ion implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost.

Suggested Citation

  • Bektaş, Gence & Kökbudak, Gamze & Keçeci, Ahmet Emin & Bütüner, Sümeyye Koçak & Asav, Hasan & Çiftpınar, Emine Hande & Canar, Hasan Hüseyin & Arıkan, Bülent & Turan, Raşit, 2021. "Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter," Renewable Energy, Elsevier, vol. 179(C), pages 2295-2299.
    • Handle: RePEc:eee:renene:v:179:y:2021:i:c:p:2295-2299
    DOI: 10.1016/j.renene.2021.08.054
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    1. Hwang, Yeonhee & Park, Chang-sub & Kim, Jisun & Kim, Jisoo & Lim, Jong-Youb & Choi, Hoonjoo & Jo, Jeongjae & Lee, Eunjoo, 2015. "Effect of laser damage etching on i-PERC solar cells," Renewable Energy, Elsevier, vol. 79(C), pages 131-134.
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