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A bounded-error approach to accuracy analysis in ellipsometry

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  • Smit, M.K.
  • Verhoof, J.W.

Abstract

A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.

Suggested Citation

  • Smit, M.K. & Verhoof, J.W., 1990. "A bounded-error approach to accuracy analysis in ellipsometry," Mathematics and Computers in Simulation (MATCOM), Elsevier, vol. 32(5), pages 545-551.
    • Handle: RePEc:eee:matcom:v:32:y:1990:i:5:p:545-551
    DOI: 10.1016/0378-4754(90)90010-G
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    References listed on IDEAS

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    1. Belforte, G. & Bona, B. & Cerone, V., 1990. "Identification, structure selection and validation of uncertain models with set-membership error description," Mathematics and Computers in Simulation (MATCOM), Elsevier, vol. 32(5), pages 561-569.
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    1. Walter, Eric & Piet-Lahanier, Hélène, 1990. "Estimation of parameter bounds from bounded-error data: a survey," Mathematics and Computers in Simulation (MATCOM), Elsevier, vol. 32(5), pages 449-468.

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