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Combining lithography and Directed Self Assembly for the manufacturing of vias: Connections to graph coloring problems, integer programming formulations, and numerical experiments

Author

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  • Ait-Ferhat, Dehia
  • Juliard, Vincent
  • Stauffer, Gautier
  • Torres, Juan Andres

Abstract

In this paper, we investigate the manufacturing of vias in integrated circuits with a new technology combining lithography and Directed Self Assembly (DSA). Optimizing the production time and costs in this new process entails minimizing the number of lithography steps, which constitutes a generalization of graph coloring. We develop integer programming formulations for several variants of interest in the industry, and then study the computational performance of our formulations on true industrial instances. We show that the best integer programming formulation achieves good computational performance, and indicate potential directions to further speed-up computational time and develop exact approaches feasible for production.

Suggested Citation

  • Ait-Ferhat, Dehia & Juliard, Vincent & Stauffer, Gautier & Torres, Juan Andres, 2020. "Combining lithography and Directed Self Assembly for the manufacturing of vias: Connections to graph coloring problems, integer programming formulations, and numerical experiments," European Journal of Operational Research, Elsevier, vol. 280(2), pages 453-468.
    • Handle: RePEc:eee:ejores:v:280:y:2020:i:2:p:453-468
    DOI: 10.1016/j.ejor.2019.07.021
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