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Development of an inter-process linkage technology for fluoro-nitric acid washing-agent and its LCA evaluation

Author

Listed:
  • Uesugi, Hiroshi
  • Suginaka, Tomohiro
  • Fujiwara, Masashi
  • Kuwauchi, Yuki
  • Hirao, Masahiko

Abstract

Fluoro-nitric acid used in the semiconductor industry as a washing agent is of high purity and high concentration (fluoric acid: 23.3%, nitric acid: 16.6%). It is recovered using separation and control in the semiconductor industry. A technology for utilizing this acid byproduct as a pickling solution for stainless steel sheets in the steel industry was developed. The results of a Life-Cycle Assessment study showed that a cascade of 10 tons of acid byproducts reduces energy consumption by 4.0 tons in crude oil conversion value, CO2 emissions by 4.3 tons, and sludge generation by 24.8 tons.

Suggested Citation

  • Uesugi, Hiroshi & Suginaka, Tomohiro & Fujiwara, Masashi & Kuwauchi, Yuki & Hirao, Masahiko, 2005. "Development of an inter-process linkage technology for fluoro-nitric acid washing-agent and its LCA evaluation," Applied Energy, Elsevier, vol. 80(2), pages 213-223, February.
    • Handle: RePEc:eee:appene:v:80:y:2005:i:2:p:213-223
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